PIXE depth profiling using variation of
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J. Miranda; J. Rickards; R. Trejo-Luna
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Article
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2006
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Elsevier Science
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English
β 127 KB
A method to apply particle induced X-ray emission (PIXE) for depth profiling, based on the variation of the X-ray detection angle, is proposed. The procedure uses X-ray yields normalized to those emitted at a particular reference angle. Application of the method to implanted samples and thin metalli