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A test of two depth profiling techniques using PIXE

✍ Scribed by Jean-Pierre Frontier; Pierre Regnier; Lucette Brilliard; Ivan Brissaud


Book ID
113277988
Publisher
Elsevier Science
Year
1986
Tongue
English
Weight
517 KB
Volume
14
Category
Article
ISSN
0168-583X

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PIXE depth profiling using variation of
✍ J. Miranda; J. Rickards; R. Trejo-Luna πŸ“‚ Article πŸ“… 2006 πŸ› Elsevier Science 🌐 English βš– 127 KB

A method to apply particle induced X-ray emission (PIXE) for depth profiling, based on the variation of the X-ray detection angle, is proposed. The procedure uses X-ray yields normalized to those emitted at a particular reference angle. Application of the method to implanted samples and thin metalli