𝔖 Bobbio Scriptorium
✦   LIBER   ✦

A comparison of techniques for depth profiling oxygen in silicon

✍ Scribed by G. Mezey; E. Kótai; T. Nagy; L. Lohner; A. Manuba; Josef Gyulai; V.R. Deline; C.A. Evans Jr.; R.J. Blattner

Publisher
Elsevier Science
Year
1979
Weight
646 KB
Volume
167
Category
Article
ISSN
0029-554X

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Depth Profiling by Ion Beams Analysis Te
Depth Profiling by Ion Beams Analysis Techniques for the Characterization of Interdiffusion in Multilayered Au-Al Systems
✍ Markwitz, A.; Demortier, G. 📂 Article 📅 1996 🏛 John Wiley and Sons 🌐 English ⚖ 668 KB

Ion beam analysis (IBA) methods were used for the characterization of interdiffusion in thin Au-A1 multilayered systems. Conventional RBS with a high depth resolution at the specimen surface and at the interfaces (e.g. 14 nm in the depth of 255 nm) was used for gold depth profiling. In contrast to g