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Depth profiling of oxygen in oxidized ceramic Si3N4 with the backscattering technique

✍ Scribed by J.M. Lombaard; O. Meyer

Publisher: Elsevier Science
Year: 1977
Weight: 359 KB
Volume: 145
Category: Article
ISSN: 0029-554X
DOI: 10.1016/0029-554x(77)90431-1

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