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Piezoresistive properties of polycrystalline silicon

✍ Scribed by Seto, John Y. W.

Book ID
119960602
Publisher
American Institute of Physics
Year
1976
Tongue
English
Weight
498 KB
Volume
47
Category
Article
ISSN
0021-8979

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An investigation into the structural, electrical and piezoresistive properties of \(\mathrm{SOI}\) (silicon-on-insulator) type structures is reported. The aim of our work is to evaluate how deposition and annealing conditions may change these properties. Various characterization experiments have bee