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[IEEE 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Wanchai, Hong Kong, China (2010.01.24-2010.01.28)] 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Evaluation of the piezoresistive and electrical properties of polycrystalline silicon-germanium for MEMS sensor applications

✍ Scribed by Gonzalez, Pilar; Haspeslagh, Luc; De Meyer, Kristin; Witvrouw, Ann

Book ID: 118248763
Publisher: IEEE
Year: 2010
Weight: 428 KB
Volume: 0
Category: Article
ISBN: 1424457610
DOI: 10.1109/memsys.2010.5442437

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