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[IEEE 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Wanchai, Hong Kong, China (2010.01.24-2010.01.28)] 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Low-temperature CMOS-compatible 3D-integration of monocrystalline-silicon based PZT RF MEMS switch actuators on rf substrates

✍ Scribed by Saharil, Farizah; Wright, Robert V.; Rantakari, Pekka; Kirby, Paul B.; Vaha-Heikkila, Tauno; Niklaus, Frank; Stemme, Goran; Oberhammer, Joachim

Book ID: 118152360
Publisher: IEEE
Year: 2010
Weight: 604 KB
Volume: 0
Category: Article
ISBN: 1424457610
DOI: 10.1109/memsys.2010.5442568

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