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[IEEE 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS) - Cancun, Mexico (2011.01.23-2011.01.27)] 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems - Modeling and characterization of a CMOS sensor with surface trenches for high-pressure applications

✍ Scribed by Baumann, M.; Ruther, P.; Paul, O.

Book ID: 118237721
Publisher: IEEE
Year: 2011
Weight: 931 KB
Volume: 0
Category: Article
ISBN: 1424496322
DOI: 10.1109/memsys.2011.5734496

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