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[IEEE 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS) - Cancun, Mexico (2011.01.23-2011.01.27)] 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems - Direct measurement of field emission current in E-static MEMS structures

✍ Scribed by Garg, Anurag; Ayyaswamy, Venkattraman; Kovacs, Andrew; Alexeenko, Alina; Peroulis, Dimitrios

Book ID: 111900550
Publisher: IEEE
Year: 2011
Weight: 409 KB
Volume: 0
Category: Article
ISBN: 1424496322
DOI: 10.1109/memsys.2011.5734449

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