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Piezoresistive transduction in multilayer polycrystalline silicon resonators

✍ Scribed by Cross, J. D.; Ilic, B. R.; Zalalutdinov, M. K.; Zhou, W.; Baldwin, J. W.; Houston, B. H.; Craighead, H. G.; Parpia, J. M.

Book ID: 121662739
Publisher: American Institute of Physics
Year: 2009
Tongue: English
Weight: 497 KB
Volume: 95
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.3241077

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