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Piezoresistive cantilevers as optical sensors for scanning near-field microscopy

โœ Scribed by P. Bauer; B. Hecht; C. Rossel


Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
354 KB
Volume
61
Category
Article
ISSN
0304-3991

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Microfabricated cantilevers for atomic force microscopy (AFM), used as scanning near-รeld optical microscopy (SNOM) probes, have remarkable advantages because the fabrication process is well established. In addition, the SNOM probe can be combined with an atomic fore microscope, which is capable of