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Piezoelectrically actuated RF MEMS DC contact switches with low voltage operation

✍ Scribed by Hee-Chul Lee, ; Jae-Yeong Park, ; Jong-Uk Bu,

Book ID
121792005
Publisher
IEEE
Year
2005
Tongue
English
Weight
408 KB
Volume
15
Category
Article
ISSN
1531-1309

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πŸ“œ SIMILAR VOLUMES

Nonlinear actuation model for lateral el
Nonlinear actuation model for lateral electrostatically-actuated DC-contact RF MEMS series switches
✍ A. LΓ‘zaro; D. Girbau; L. Pradell; A. Nebot πŸ“‚ Article πŸ“… 2007 πŸ› John Wiley and Sons 🌐 English βš– 344 KB

## Abstract In this work, a nonlinear model to predict actuation characteristics in lateral electrostatically‐actuated DC‐contact MEMS switches is proposed. In this case a parallel‐plate approximation cannot be applied. The model is based on the equilibrium equation for an elastic beam. It is demon