Low-voltage high-isolation DC-to-RF MEMS switch based on an S-shaped film actuator

✍ Scribed by Oberhammer, J.; Stemme, G.

• Book ID: 114617289
• Publisher: IEEE
• Year: 2004
• Tongue: English
• Weight: 315 KB
• Volume: 51
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/ted.2003.820655