Low voltage actuated RF micromechanical switches fabricated using CMOS-MEMS technique

High-voltage devices and circuits fabric

High-voltage devices and circuits fabricated using foundry CMOS for use with electrostatic MEM actuators

✍ N.I. Maluf; R.J. Reay; G.T.A. Kovacs 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 634 KB

Devices and circuits capable of high-voltage operation are necessary for the actuation of micromachined electrostatic structures that require high voltages (20-100 V). These high-voltage devices have traditionally been fabricated using specialized processes. Monolithic integration of the actuators w