A fully wafer-level packaged RF MEMS switch with low actuation voltage using a piezoelectric actuator

✍ Scribed by Park, Jae-Hyoung; Lee, Hee-Chul; Park, Yong-Hee; Kim, Yong-Dae; Ji, Chang-Hyeon; Bu, Jonguk; Nam, Hyo-Jin

• Book ID: 119938214
• Publisher: Institute of Physics
• Year: 2006
• Tongue: English
• Weight: 896 KB
• Volume: 16
• Category: Article
• ISSN: 0960-1317
• DOI: 10.1088/0960-1317/16/11/005