๐”– Bobbio Scriptorium
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Physics of Thin Films

โœ Scribed by Pitt, C.W.


Book ID
118678537
Publisher
The Institution of Electrical Engineers
Year
1979
Weight
200 KB
Volume
25
Category
Article
ISSN
0013-5127

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๐Ÿ“œ SIMILAR VOLUMES


Physical properties of TiN thin films
โœ F. Marchetti; M. Dapor; S. Girardi; F. Giacomozzi; A. Cavalleri ๐Ÿ“‚ Article ๐Ÿ“… 1989 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 350 KB

This" paper reports on the characterization of films of titanium nitride (TIN) obtained by reactive sputtering of titanium in a nitrogen-rich ambient (r.f. sputtering) and by nitrogen implantation during vapour deposition of titanium thin films. In order to get a complete picture of the properties