๐”– Bobbio Scriptorium
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Physics, fabrication, and characterization of thin films

โœ Scribed by H. Kraus; M. Gutsche; J. Jochum; B. Kemmather

Book ID
104890510
Publisher
Springer US
Year
1993
Tongue
English
Weight
518 KB
Volume
93
Category
Article
ISSN
0022-2291

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Fabrication and characterization of amorphous lithium electrolyte thin films and rechargeable thin-film batteries
โœ J.B. Bates; N.J. Dudney; G.R. Gruzalski; R.A. Zuhr; A. Choudhury; C.F. Luck; J.D ๐Ÿ“‚ Article ๐Ÿ“… 1993 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 407 KB

Amorphous oxide and oxynitride lithium electrolyte thin films were synthesized by r.f. magnetron sputtering of lithium silicates and lithium phosphates in Ar, Ar+O x, Ar+N" or N 2 . The composition, structure, and electrical properties of the films were characterized using ion and electron beam, X-r