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Fabrication and characterization of the gapless half-Heusler YPtSb thin films

โœ Scribed by Wang, Wenhong; Du, Yin; Liu, Enke; Liu, Zhongyuan; Wu, G. H.

Book ID
118175949
Publisher
American Institute of Physics
Year
2012
Tongue
English
Weight
941 KB
Volume
112
Category
Article
ISSN
0021-8979

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Amorphous oxide and oxynitride lithium electrolyte thin films were synthesized by r.f. magnetron sputtering of lithium silicates and lithium phosphates in Ar, Ar+O x, Ar+N" or N 2 . The composition, structure, and electrical properties of the films were characterized using ion and electron beam, X-r