✦ LIBER ✦

Physical properties of TiN thin films

✍ Scribed by F. Marchetti; M. Dapor; S. Girardi; F. Giacomozzi; A. Cavalleri

Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 350 KB
Volume: 115
Category: Article
ISSN: 0921-5093
DOI: 10.1016/0921-5093(89)90682-5

No coin nor oath required. For personal study only.

✦ Synopsis

This" paper reports on the characterization of films of titanium nitride (TIN) obtained by reactive sputtering of titanium in a nitrogen-rich ambient (r.f. sputtering) and by nitrogen implantation during vapour deposition of titanium thin films.

In order to get a complete picture of the properties of the atoms in these systems the thin films were characterized with Auger electron spectroscopy and with a Seeman-Bohlin X-ray diffractometer. The overlayers were analysed by four-point probe to evaluate the resistivity.

The observed chemical and physical properties of the films strongly depend on both the growth technique and the particular parameters employed.

📜 SIMILAR VOLUMES

Physical properties of arsenic-doped tin

Physical properties of arsenic-doped tin oxide thin films

✍ S.R. Vishwakarma; J.P. Upadhyay; H.C. Prasad 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 650 KB

Correlations between the structural and

Correlations between the structural and physical properties of indium tin oxide thin films and their preparation parameters

✍ M. Czermann; Gy. Vágó; O. Geszti; M. Menyhárd 📂 Article 📅 1984 🏛 Elsevier Science 🌐 English ⚖ 34 KB

Quantification of physical properties of

Quantification of physical properties of thin films

✍ S.S. Nandra; R.A. Haber; K. Hatton; S. Nadel 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 698 KB

Physical properties of thin heteroepitax

Physical properties of thin heteroepitaxial silicon films

✍ J. Mercier 📂 Article 📅 1971 🏛 Elsevier Science 🌐 English ⚖ 74 KB

Dielectric Properties of Tin Oxide Thin

Dielectric Properties of Tin Oxide Thin Film Capacitors

✍ Dr. J. Siva Kumar; Dr. U. V. Subba Rao 📂 Article 📅 1991 🏛 John Wiley and Sons 🌐 English ⚖ 260 KB 👁 1 views

Thin films of several thicknesses in the form of MIM structures are prepared from the powders of tin oxide (SnO,) by thermal evaporation technique in a vacuum of Torr. The dielectric properties of tin oxide film capacitors have been studied with temperatures varying from 77 to 400 K and also with fr

Physical properties in thin films of iro

Physical properties in thin films of iron oxides

✍ J.D. Uribe; J. Osorio; C.A. Barrero; D. Giratá; A.L. Morales; A. Hoffmann 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 268 KB