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Physical properties in thin films of iron oxides

✍ Scribed by J.D. Uribe; J. Osorio; C.A. Barrero; D. Giratá; A.L. Morales; A. Hoffmann


Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
268 KB
Volume
39
Category
Article
ISSN
0026-2692

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Physical properties of TiN thin films
✍ F. Marchetti; M. Dapor; S. Girardi; F. Giacomozzi; A. Cavalleri 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 350 KB

This" paper reports on the characterization of films of titanium nitride (TIN) obtained by reactive sputtering of titanium in a nitrogen-rich ambient (r.f. sputtering) and by nitrogen implantation during vapour deposition of titanium thin films. In order to get a complete picture of the properties