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Physical vapor deposition of thick cr and its carbide and nitride films by hollow-cathode discharge

Book ID: 108389506
Publisher: Elsevier Science
Year: 1976
Tongue: English
Weight: 337 KB
Volume: 26
Category: Article
ISSN: 0042-207X
DOI: 10.1016/s0042-207x(76)80582-9

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