Formation of thick titanium carbide films by the hollow cathode discharge reactive deposition process

✍ Scribed by Souji Komiya; Nobuo Umezu; Tadashi Narusawa

• Publisher: Elsevier Science
• Year: 1978
• Tongue: English
• Weight: 438 KB
• Volume: 54
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(78)90276-6