Physical and electrical characterization of high-k ZrO2 metal–insulator–metal capacitor

✍ Scribed by Joo-Hyung Kim; Velislava Ignatova; Peter Kücher; Johannes Heitmann; Lars Oberbeck; Uwe Schröder

• Book ID: 108290068
• Publisher: Elsevier Science
• Year: 2008
• Tongue: English
• Weight: 690 KB
• Volume: 516
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/j.tsf.2008.03.051