Photoresist materials and applications : R. O. Lussow, J. Vac. Sci. Technol. 6 (1), Jan.–Feb. (1969), p. 18

• Book ID: 103272558
• Publisher: Elsevier Science
• Year: 1970
• Tongue: English
• Weight: 101 KB
• Volume: 9
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(70)90048-x