𝔖 Bobbio Scriptorium

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RF sputtering of multilayer thin films : L. Herte et al., J. Vac. Sci. Technol. 6 (1) Jan.–Feb. (1969), p. 109

Publisher: Elsevier Science
Year: 1970
Tongue: English
Weight: 94 KB
Volume: 9
Category: Article
ISSN: 0026-2714
DOI: 10.1016/0026-2714(70)90096-x

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