Electrical characterization of radio-frequency sputtering gas discharge : J. S. Logan et al., J. Vac. Sci. Technol. 6 (1), Jan.–Feb. (1969), p. 120

• Publisher: Elsevier Science
• Year: 1970
• Tongue: English
• Weight: 107 KB
• Volume: 9
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(70)90098-3