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Photoluminescence properties in microcrystalline Silicon films

โœ Scribed by Hsiangna Liu; Wenguo Tang; Xiaomei Feng; Zhiyuan Li


Publisher
Elsevier Science
Year
1988
Tongue
English
Weight
125 KB
Volume
40-41
Category
Article
ISSN
0022-2313

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๐Ÿ“œ SIMILAR VOLUMES


Microcrystalline silicon thin films: A r
โœ A. Dussan; R.H. Buitrago; R.R. Koropecki ๐Ÿ“‚ Article ๐Ÿ“… 2008 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 449 KB

In this work we present a study of the optical, electrical, electronic and structural properties of Boron doped hydrogenated microcrystalline silicon thin films (mc-Si:H). The films were deposited in an RF plasma reactor using as reactive gas a mixture of silane and diborane, both highly diluted in