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Characterization of microcrystallinity in hydrogenated silicon thin films

โœ Scribed by C. Godet; B. Marchon; M.P. Schmidt


Publisher
Elsevier Science
Year
1987
Tongue
English
Weight
759 KB
Volume
155
Category
Article
ISSN
0040-6090

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Microcrystalline silicon thin films: A r
โœ A. Dussan; R.H. Buitrago; R.R. Koropecki ๐Ÿ“‚ Article ๐Ÿ“… 2008 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 449 KB

In this work we present a study of the optical, electrical, electronic and structural properties of Boron doped hydrogenated microcrystalline silicon thin films (mc-Si:H). The films were deposited in an RF plasma reactor using as reactive gas a mixture of silane and diborane, both highly diluted in