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Thin boron doped microcrystalline silicon films

✍ Scribed by D.S. Shen; P.K. Bhat


Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
333 KB
Volume
30
Category
Article
ISSN
0927-0248

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Microcrystalline silicon thin films: A r
✍ A. Dussan; R.H. Buitrago; R.R. Koropecki πŸ“‚ Article πŸ“… 2008 πŸ› Elsevier Science 🌐 English βš– 449 KB

In this work we present a study of the optical, electrical, electronic and structural properties of Boron doped hydrogenated microcrystalline silicon thin films (mc-Si:H). The films were deposited in an RF plasma reactor using as reactive gas a mixture of silane and diborane, both highly diluted in