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Photoluminescence of Si3N4films implanted with Ge+and Ar+ions

✍ Scribed by I. E. Tyschenko; V. A. Volodin; L. Rebohle; M. Voelskov; V. Skorupa

Book ID: 110120077
Publisher: Springer
Year: 1999
Tongue: English
Weight: 132 KB
Volume: 33
Category: Article
ISSN: 1063-7826
DOI: 10.1134/1.1187721

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