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Two-dimensional distributions of Xe ions implanted in Si3N4 films

✍ Scribed by Ke-Ming Wang; Zhong-Lie Wang; Bo-Rong Shi; Bao-Dong Qu; Xiang-Dong Liu; Ji-Tian Liu; Qing-Tai Zhao

Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
403 KB
Volume
44
Category
Article
ISSN
0042-207X

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