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Photoluminescence from SiN x O y films deposited by reactive sputtering

✍ Scribed by Sombrio, G; Franzen, P L; Maltez, R L; Matos, L G; Pereira, M B; Boudinov, H

Book ID: 121448693
Publisher: Institute of Physics
Year: 2013
Tongue: English
Weight: 567 KB
Volume: 46
Category: Article
ISSN: 0022-3727
DOI: 10.1088/0022-3727/46/23/235106

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