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Photoluminescence and photoluminescence excitation spectroscopy of Al0.48In0.52As

✍ Scribed by Olsthoorn, S. M.; Driessen, F. A. J. M.; Eijkelenboom, A. P. A. M.; Giling, L. J.

Book ID
120195727
Publisher
American Institute of Physics
Year
1993
Tongue
English
Weight
883 KB
Volume
73
Category
Article
ISSN
0021-8979

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We have performed Photoreflectance (PR), Raman Scattering (RS), and Photoluminescence (PL) experiments to characterize the Ino.52Alo.48As surface exposed to plasma by a gas mixture of CHJHz/Ar, PR spectra indicate that RIE (plasma) causes defects such as nonradiative recombination centers, scatterin