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Photoluminescence and bonding structure evolution of amorphous carbon films with laser intensity

✍ Scribed by X.L. Ding; Q.S. Li; X.H. Kong

Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 228 KB
Volume: 404
Category: Article
ISSN: 0921-4526
DOI: 10.1016/j.physb.2009.03.009

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## Abstract The carbon‐rich hydrogenated amorphous silicon carbide (a‐Si~1−__x__~C~__x__~:H) films were deposited by plasma enhanced chemical vapor deposition using silane (diluted to 10% in hydrogen) and ethylene as the gas sources. To observe surface enhanced Raman scattering (SERS), some samples