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Characterization of the bonding structure of nanocrystalline diamond and amorphous carbon films prepared by plasma assisted techniques

โœ Scribed by C. Popov; W. Kulisch; S. Bliznakov; B. Mednikarov; G. Spasov; J. Pirov; M. Jelinek; T. Kocourek; J. Zemek


Publisher
Springer
Year
2007
Tongue
English
Weight
341 KB
Volume
89
Category
Article
ISSN
1432-0630

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Structural and mechanical characterizati
โœ Sambita Sahoo; Swati S. Pradhan; Venkateswarlu Bhavanasi; S.K. Pradhan ๐Ÿ“‚ Article ๐Ÿ“… 2010 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 899 KB

Diamond like carbon (DLC) films is useful for tribology, optical and biocompatible coating applications. Plasma-activated processes such as radio frequency (RF) plasma CVD and electron cyclotron resonance (ECR) microwave (MW) plasma CVD are usually used to grow DLC films. By using a bowl shaped stee