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Photoelectron spectroscopy study of the effect of substrate doping on an HfO2/SiO2/n-Si gate stack

โœ Scribed by N. Barrett; O. Renault; J.-F. Damlencourt; F. Maccherozzi; M. Fabrizioli


Book ID
116669969
Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
320 KB
Volume
353
Category
Article
ISSN
0022-3093

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