Effect of an Si3N4/PSG/SiO2multilayer dielectric coating on the spectral sensitivity of elements in CMOS area imagers

✍ Scribed by I. V. Vanyushin; V. A. Gergel’; N. M. Gorshkova; K. M. Zatolokin; A. N. Knyazev

• Book ID: 111451402
• Publisher: SP MAIK Nauka/Interperiodica
• Year: 2006
• Tongue: English
• Weight: 174 KB
• Volume: 51
• Category: Article
• ISSN: 1064-2269
• DOI: 10.1134/s1064226906120151