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Photodecomposition and bactericidal effects of TiO2thin films prepared by a magnetron sputtering

โœ Scribed by Yong-Lak Choi; Seon-Hwa Kim; Yo-Seoung Song; Deuk Yong Lee


Book ID
111590755
Publisher
Springer
Year
2004
Tongue
English
Weight
371 KB
Volume
39
Category
Article
ISSN
0022-2461

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TiO 2 thin films were deposited on stainless steel substrates by radio frequency (RF) magnetron sputtering. The process conditions, including RF power, oxygen partial pressure, and temperature of substrate, were varied systematically. The deposited titanium dioxide films consisted of polycrystalline