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Photoassisted etching of silicon dioxide films

✍ Scribed by E. N. Gudymovich; E. Yu. Vanifat’eva

Book ID: 110164796
Publisher: SP MAIK Nauka/Interperiodica
Year: 2009
Tongue: English
Weight: 188 KB
Volume: 43
Category: Article
ISSN: 0018-1439
DOI: 10.1134/s0018143909040109

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