✦ LIBER ✦

Photo CVD system for silicon nitride film

✍ Scribed by Y. Numasawa; K. Yamazaki; K. Hamano

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Physico-chemical properties of photo-CVD

✍ M. Berti; M. Meliga; G. Rovai; S. Stano; S. Tamagno 📂 Article 📅 1988 🏛 Elsevier Science 🌐 English ⚖ 744 KB

Thermal annealing effect of silicon nitr

✍ Yasushi Deguchi; Michio Ohnishi; Yoshihiro Takahashi; Kazunori Ohnishi 📂 Article 📅 1997 🏛 John Wiley and Sons 🌐 English ⚖ 247 KB

Structure investigation of photo-CVD sil

✍ GM Nikolić 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 185 KB

Microstructure and properties of CVD sil

✍ L.I. Popova; P.K. Vitanov; B.Z. Antov; N.K. Pashov 📂 Article 📅 1979 🏛 Elsevier Science 🌐 English ⚖ 852 KB

Photo-CVD silicon nitride thin layers as

✍ V. Rocher; S. Poyard; N. Jaffrezic-Renault; C. Ajoux; M. Lemiti; A. Sibai 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 511 KB

Remote Plasma-Enhanced CVD of Fluorinate

✍ Prof. Sergei E. Alexandrov; Michael L. Hitchman 📂 Article 📅 1997 🏛 John Wiley and Sons 🌐 English ⚖ 722 KB