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Structure investigation of photo-CVD silicon nitride films by IR and ESR spectroscopy

✍ Scribed by GM Nikolić

Publisher: Elsevier Science
Year: 1990
Tongue: English
Weight: 185 KB
Volume: 40
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(90)90140-t

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