✦ LIBER ✦
Photo-CVD silicon nitride thin layers as pH-ISFET sensitive membrane
✍ Scribed by V. Rocher; S. Poyard; N. Jaffrezic-Renault; C. Ajoux; M. Lemiti; A. Sibai
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 511 KB
- Volume
- 19
- Category
- Article
- ISSN
- 0925-4005
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