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Phosphorus diffusion into silicon from chemically vapour-deposited phosphosilicate glass

✍ Scribed by G.F. Cerofolini; M.L. Polignano; P. Picco; M. Finetti; S. Solmi; M. Gallorini


Publisher
Elsevier Science
Year
1982
Tongue
English
Weight
307 KB
Volume
87
Category
Article
ISSN
0040-6090

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