✦ LIBER ✦
Shallow junction formation by phosphorus diffusion from in situ spike-doped chemical vapor deposited amorphous silicon
✍ Scribed by D. Krüger; J. Schlote; W. Röpke; R. Kurps; Ch. Quick
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 601 KB
- Volume
- 26
- Category
- Article
- ISSN
- 0167-9317
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