Controlled phosphorus diffusion into silicon from P2O5 vapour using a red phosphorus source

✍ Scribed by A.G. Nassibian; G. Whiting

• Publisher: Elsevier Science
• Year: 1965
• Tongue: English
• Weight: 877 KB
• Volume: 8
• Category: Article
• ISSN: 0038-1101
• DOI: 10.1016/0038-1101(65)90094-8