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Phenomenological Model of the Piezoresistive Effect in Polysilicon Films

✍ Scribed by V. A. Gridchin; V. M. Lubimsky

Book ID
111543207
Publisher
Springer
Year
2003
Tongue
English
Weight
56 KB
Volume
32
Category
Article
ISSN
1063-7397

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Compliant piezoresistive MEMS sensors exhibit great promise for improved on-chip sensing. As compliant sensors may experience complex loads, their design and implementation require a greater understanding of the piezoresistive effect of polysilicon in bending and combined loads. This paper presents