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The effect of the insulating layer thickness on the piezoresistive properties of polysilicon film

✍ Scribed by Zhou Weiping; Weng Juewei; Lai Zongsheng; Tan Songshen

Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 111 KB
Volume: 42
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(91)91407-f

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