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Phase transformation of tungsten films deposited by diode and inductively coupled plasma magnetron sputtering

โœ Scribed by G. S. Chen; H. S. Tian; C. K. Lin; G. Chen; H. Y. Lee


Book ID
121734893
Publisher
AVS (American Vacuum Society)
Year
2004
Tongue
English
Weight
522 KB
Volume
22
Category
Article
ISSN
0734-2101

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