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PECVD Silicon Nitride Passivation of AlGaN/GaN Heterostructures

✍ Scribed by Gatabi, Iman Rezanezhad; Johnson, Derek W.; Woo, Jung Hwan; Anderson, Jonathan W.; Coan, Mary R.; Piner, Edwin L.; Harris, Harlan Rusty

Book ID: 120607569
Publisher: IEEE
Year: 2013
Tongue: English
Weight: 638 KB
Volume: 60
Category: Article
ISSN: 0018-9383
DOI: 10.1109/TED.2013.2242075

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