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Peculiarities and mechanism of the cone growth under ion bombardment

✍ Scribed by L.B. Begrambekov; A.M. Zakharov; V.G. Telkovsky


Book ID
113287520
Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
439 KB
Volume
115
Category
Article
ISSN
0168-583X

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## Abstract The previously reported^1,2^ effect of low‐energy (several keV) ion bombardment on the surface topography of InP was investigated by scanning transmission electron microscopy. Convergent beam electron diffraction patterns of the surface growth β€˜cones’ induced by argon ion bombardment of