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Patterning of an electron beam resist with a scanning tunnelling microscope operating in air

✍ Scribed by K. Kragler; E. Günther; R. Leuschner; G. Falk; H. von Seggern; G. Saemann-Ischenko


Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
495 KB
Volume
264
Category
Article
ISSN
0040-6090

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